Clean Room: Micro and Nano Fabrication Facility
Clean Room: Micro and Nano Fabrication Facility
Major cleanroom facilities.
BITS Pilani Hyderabad campus established state of the art facilities for Micro and Nano semiconductor device fabrication and characterization. The size of clean room is 581 sq. f and 80% of it is maintained as (ISO 6) class 1000 and the rest is class 100 (ISO 5). Complete class 100 area covered with yellow light and dedicated for Lithography process.
Clean room short video
Equipment Usage Request Form
Equipment Slot Booking Form
Clean Room Facility Overview Request Form
Contact Us
Mr. Narayana Rao G.
Deputy Manager
Email: gnrao@hyderabad.bits-pilani.ac.in
In charge:
Prof. Satish Kumar Dubey
Associate Professor
Department of Mechanical Engineering
BITS Pilani Hyderabad Campus
Email: satishdubey @ hyderabad.bits-pilani.ac.in
Phone: +91-40-66303673
Still have questions?
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